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Non-coplanar multi-beam interference produced by one triangular pyramid for fabricating photonic crystals
Wanghua Xiang, Jie Liang, Guizhong Zhang, Lijun Wu, K. S. Wong, and G. K. L. Wong
A method for fabricating three-dimensional (3D) photonic crystals (PhCs) easily and simply, by using a visible light (~532 nm) to pass one triangular pyramid to form non-coplanar multi-beam interference, named laser interference etching technique, is reported. In the experiment, we exposed a 9-μm-thick photo-resist on the silicon substrate with exposure intensities of 150, 180, and 220 mJ/cm2, and produced the periodical nanostructures. Through varying a common angle in the triangular pyramid, other interference patterns can be obtained to fabricate various PhCs. A method for fabricating three-dimensional (3D) photonic crystals (PhCs) easily and simply, by using a visible light (~532 nm) to pass one triangular pyramid to form non-coplanar multi-beam interference, named laser interference etching technique, is reported. In the experiment, we exposed a 9-μm-thick photo-resist on the silicon substrate with exposure intensities of 150, 180, and 220 mJ/cm2, and produced the periodical nanostructures. Through varying a common angle in the triangular pyramid, other interference patterns can be obtained to fabricate various PhCs.
Chinese Optics Letters
- Publication Date: Jan. 01, 2005
- Vol. 3, Issue 12, 12712 (2005)
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